Imprinting device
US9950463B2 · kind B2 · utility
1Cited by
0References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2016 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Sep 30, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29K2105/24
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An imprinting device capable of realizing uniform transfer regardless of the thickness of a substrate includes a stage having a placement area for placing a substrate to which a transferred object is applied, a thin-plate mold with flexibility having a fine pattern on a first surface facing the placement area of the stage, which is held with a predetermined tension and a pressing roll which can press a second surface opposite to the first surface of the mold, in which the stage has plural adsorption holes around the placement area, and the adsorption holes start adsorption in synchronization with movement of the pressing roll.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.