Upstream volume mass flow verification systems and methods
US9952078B2 · kind B2 · utility
3Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2014 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Mar 4, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/17
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery/measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.