Local alignment point calibration method in die inspection
US9953803B2 · kind B2 · utility
2Cited by
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24Claims
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Key dates
| Filing date | Feb 22, 2016 |
| Grant date | Apr 24, 2018 |
| Priority date | — |
| Expiry date | Jun 29, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.