Method of ptychographic imaging
US9959639B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2016 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Oct 24, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution (“sharpness”), all features are there.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.