Device for measuring the distribution or impulse of a series of droplets
US9960057B2 · kind B2 · utility
0Cited by
3References
3Claims
0Family size
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Key dates
| Filing date | Dec 18, 2014 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Jun 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67288
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for measuring the distribution and/or impulse of a series of droplets comprises a piezoelectric sensor positioned relative to a source of droplets such that each of a plurality of droplets contacts the piezoelectric sensor in succession, thereby to generate an electrical signal. Logic circuitry is configured to calculate one or more frequencies from the electrical signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.