Radiation collector, radiation source and lithographic apparatus
US9983482B2 · kind B2 · utility
0Cited by
6References
18Claims
0Family size
Assignees
Inventors
- Erik Roelof Loopstra
- Olav Waldemar Vladimir Frijns
- Stig Bieling
- Antonius Theodorus Wilhelmus Kempen
- Ivo Vanderhallen
- Nicolaas Ten Kate
- Ruud Antonius Catharina Maria Beerens
- Richard Henricus Adrianus Van Lieshout
- Theodorus Petrus Maria Cadee
- Sjoerd Nicolaas Lambertus Donders
- Alexander Matthijs Struycken
- Marcus Petrus Scheepers
Key dates
| Filing date | Feb 26, 2014 |
| Grant date | May 29, 2018 |
| Priority date | — |
| Expiry date | Apr 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/009
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.