Patent · US Active

Particle beam system and method for operating a particle optical unit

US9991089B2 · kind B2 · utility

23Cited by

3References

24Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Ingo Mueller · Heidelberg, DE
Nicole Rauwolf · Birkhausen, DE
Christof Riedesel · Oberkochen, DE
Thomas Kemen · Meppen, DE
Joerg Jacobi · Herbrechtingen, DE
Arne Thoma · Heidenheim, DE
Markus Doering · Heidelberg, DE
Dirk Zeidler · Oberkochen, DE
Juergen Kynast · Jena, DE
Gerd Benner · Aalen, DE

Key dates

Filing date	Oct 19, 2017
Grant date	Jun 5, 2018
Priority date	—
Expiry date	Oct 19, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31774
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.