Substrate heating device, substrate heating method and computer-readable storage medium
US9991140B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2015 |
| Grant date | Jun 5, 2018 |
| Priority date | — |
| Expiry date | Feb 12, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate heating device includes: heating modules each having a processing vessel within which a heating plate is disposed, an gas inlet port for introducing a purge gas into a processing atmosphere, and an exhaust port for exhausting the processing atmosphere; individual exhaust paths each connected to the exhaust port of the heating modules; a common exhaust path connected to downstream ends of the individual exhaust paths of the heating modules; a branch path branched from the individual exhaust paths and opened to the outside of the processing vessel; and an exhaust flow rate adjusting unit configured to adjust a flow rate ratio of an exhaust flow rate of a gas exhausted from the exhaust port into the common exhaust path and an introduction flow rate of a gas introduced from the outside of the processing vessel into the common exhaust path through the branch path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.