Koji Takayanagi
36Patents
5h-index
37Co-inventors
65Inventor score
Filing activity: Feb 28, 2008 → Jun 8, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD610176S1 | Coater cup | General | 35 | Expired |
| US11273464B2 | Substrate processing apparatus | Performing Operations; Transporting | 6 | Active |
| US9162247B2 | Coating and development treatment system with airflow control including control unit and movable airflow control plate | Emerging Cross-Sectional Technologies | 6 | Active |
| US9948283B2 | Semiconductor device | Electricity | 5 | Active |
| US8375887B2 | Solution treatment apparatus, solution treatment method and resist coating method | Electricity | 5 | Active |
| US8304018B2 | Coating method | Electricity | 5 | Active |
| US10838311B2 | Coating and developing apparatus and coating and developing method | Electricity | 4 | Active |
| US8414972B2 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Electricity | 4 | Active |
| US9846363B2 | Processing liquid supplying apparatus and method of supplying processing liquid | Electricity | 3 | Active |
| US8318247B2 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Physics | 2 | Active |
| US9991140B2 | Substrate heating device, substrate heating method and computer-readable storage medium | Electricity | 2 | Active |
| US9732910B2 | Processing-liquid supply apparatus and processing-liquid supply method | Emerging Cross-Sectional Technologies | 2 | Active |
| US10734251B2 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US10074546B2 | Processing liquid supplying apparatus and processing liquid supplying method | Electricity | 2 | Active |
| US9576829B1 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Electricity | 1 | Active |
| US10062669B2 | Semiconductor device | Electricity | 1 | Active |
| US9947534B2 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Emerging Cross-Sectional Technologies | 1 | Active |
| US10256122B2 | Substrate heating method | Electricity | 1 | Active |
| US11062899B2 | Coated film removing apparatus | Electricity | 1 | Active |
| US9948090B2 | Semiconductor device | Electricity | 1 | Active |
| US11342198B2 | Processing liquid supplying apparatus and processing liquid supplying method | Electricity | 1 | Active |
| US10236868B2 | Semiconductor device | Electricity | 1 | Active |
| US9508574B2 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Electricity | 1 | Active |
| US9576934B2 | Semiconductor device | Electricity | 1 | Active |
| US12362743B2 | Semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.