Topography simulation apparatus, topography simulation method and recording medium
US9996639B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 13, 2015 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Oct 27, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
In one embodiment, a topography simulation apparatus includes a division module to divide a calculating area for calculating topography of a substance into cells and express the topography using filled cells and vacant cells, and a calculation module to calculate a filling rate for a target cell based on processing rates for its neighboring cells. The calculation module calculates, based on the processing rates for the neighboring cells, contributing rates of the neighboring cells contributing to the filling rate for the target cell. The calculation module calculates, based on the contributing rates of the neighboring cells, the filling rate for the target cell. One of the contributing rates of the neighboring cells of the target cell depends on whether another neighboring cell of the target cell is a first cell whose filling ratio belongs to first range or a second cell whose filling ratio belongs to second range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.