Substrate container with purge ports
US9997388B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2013 |
| Grant date | Jun 12, 2018 |
| Priority date | — |
| Expiry date | Aug 22, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D85/38
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a “solid compliant” construction, wherein the mounting face complies with the mouth of the tool port without substantially changing shape. In other embodiments, the grommet is of a “flexible compliant” construction, wherein the grommet changes shape when engaged with the tool port. The grommet can be configured so that the force (pressure-area product) exerted in the direction towards the tool port is greater than the force exerted in the direction away from the tool port, thereby enhancing the seal between the grommet and the tool port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.