Semiconductor deposition reactor ring
USD1028913S1 · kind S1 · design
0Cited by
35References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2021 |
| Grant date | May 28, 2024 |
| Priority date | — |
| Expiry date | May 28, 2039 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.