Inventor · West Babylon, NY, US

Xing Lin

30Patents
5h-index
76Co-inventors
68Inventor score

Filing activity: Oct 22, 2010 → Jun 30, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10950477B2 Ceramic heater and esc with enhanced wafer edge performance Electricity 264 Active
US8633423B2 Methods and apparatus for controlling substrate temperature in a process chamber Emerging Cross-Sectional Technologies 121 Active
US9123762B2 Substrate support with symmetrical feed structure Electricity 36 Active
US10403535B2 Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system Electricity 7 Active
USD1030687S1 Susceptor General 6 Active
US9725806B2 Multi-zone pedestal for plasma processing Electricity 5 Active
US8982530B2 Methods and apparatus toward preventing ESC bonding adhesive erosion Emerging Cross-Sectional Technologies 4 Active
US11764101B2 Susceptor for semiconductor substrate processing Electricity 3 Active
USD1067204S1 Susceptor General 3 Active
US11053591B2 Multi-port gas injection system and reactor system including same Electricity 2 Active
US10879041B2 Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers Electricity 2 Active
US9948214B2 High temperature electrostatic chuck with real-time heat zone regulating capability Performing Operations; Transporting 1 Active
US8492980B2 Methods for calibrating RF power applied to a plurality of RF coils in a plasma processing system Electricity 1 Active
US10090187B2 Multi-zone pedestal for plasma processing Electricity 1 Active
US10692703B2 Ceramic heater with enhanced RF power delivery Electricity 1 Active
USD1031676S1 Combined susceptor, support, and lift system General 1 Active
US10770328B2 Substrate support with symmetrical feed structure Electricity 0 Active
US12417933B2 Wafer far edge temperature measurement system with lamp bank alignment Physics 0 Active
US12112938B2 Semiconductor processing preclean methods and apparatus Electricity 0 Active
US12394659B2 Susceptors with film deposition control features Electricity 0 Active
US12006572B2 Reactor system including a gas distribution assembly for use with activated species and method of using same Electricity 0 Active
US12234554B2 Semiconductor deposition reactor and components for reduced quartz devitrification Electricity 0 Active
US10811301B2 Dual-zone heater for plasma processing Electricity 0 Active
US10497606B2 Dual-zone heater for plasma processing Electricity 0 Active
US10096494B2 Substrate support with symmetrical feed structure Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.