Support pipe for an interlocking process kit for a substrate processing chamber

USD1042374S1 · kind S1 · design

Assignee

• Applied Materials, Inc. · US

Inventors

• Sahiti Nallagonda · San Jose, US
• Jonathan Simmons · San Francisco, US
• Xinwei Huang · San Jose, US
• Peter Muraoka · San Mateo, US
• Andreas Schmid · Duisburg, DE

Key dates

• Filing date: Mar 18, 2022
• Grant date: Sep 17, 2024
• Expiry date: Sep 17, 2039

Classification

• Technology area (CPC —): General