Jonathan Simmons
8Patents
2h-index
9Co-inventors
40Inventor score
Filing activity: Jul 25, 2011 → Mar 18, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8316867B2 | Electrostatic chuck cleaning during semiconductor substrate processing | Electricity | 4 | Active |
| USD1055006S1 | Support ring for an interlocking process kit for a substrate processing chamber | General | 4 | Active |
| US11380572B2 | Substrate support carrier with improved bond layer protection | Electricity | 2 | Active |
| USD1042374S1 | Support pipe for an interlocking process kit for a substrate processing chamber | General | 1 | Active |
| US10867829B2 | Ceramic hybrid insulator plate | Electricity | 0 | Active |
| US10698490B2 | Haptic feedback device, method and system | Physics | 0 | Active |
| USD1042373S1 | Sliding ring for an interlocking process kit for a substrate processing chamber | General | 0 | Active |
| US11651987B2 | Substrate support carrier with improved bond layer protection | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.