Patent · US Active

Deposition ring of a process kit for semiconductor substrate processing

USD1059312S1 · kind S1 · design

2Cited by
7References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 4, 2022
Grant dateJan 28, 2025
Priority date
Expiry dateJan 28, 2040

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.