Inventor · Pleasanton, CA, US

Edwin C. Suarez

20Patents
4h-index
37Co-inventors
63Inventor score

Filing activity: May 2, 2003 → Aug 4, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6830624B2 Blocker plate by-pass for remote plasma clean Chemistry; Metallurgy 306 Expired
US9355922B2 Systems and methods for internal surface conditioning in plasma processing equipment Electricity 147 Active
US9966240B2 Systems and methods for internal surface conditioning assessment in plasma processing equipment Electricity 100 Active
USD1038049S1 Cover ring for use in semiconductor processing chamber General 13 Active
US11400560B2 Retaining ring design Electricity 4 Active
US10589399B2 Textured small pad for chemical mechanical polishing Performing Operations; Transporting 2 Active
USD1059312S1 Deposition ring of a process kit for semiconductor substrate processing General 2 Active
USD600956S1 Machine cabinet General 1 Expired
US11996315B2 Thin substrate handling via edge clamping Electricity 1 Active
US10593523B2 Systems and methods for internal surface conditioning in plasma processing equipment Electricity 0 Active
US12100579B2 Deposition ring for thin substrate handling via edge clamping Electricity 0 Active
US12340979B2 Semiconductor processing chamber for improved precursor flow Electricity 0 Active
US10490418B2 Systems and methods for internal surface conditioning assessment in plasma processing equipment Electricity 0 Active
USD1064005S1 Grounding ring of a process kit for semiconductor substrate processing General 0 Active
US10707061B2 Systems and methods for internal surface conditioning in plasma processing equipment Electricity 0 Active
US10610994B2 Polishing system with local area rate control and oscillation mode Electricity 0 Active
US9850576B2 Anti-arc zero field plate Electricity 0 Active
USD1069863S1 Deposition ring of a process kit for semiconductor substrate processing General 0 Active
US10796922B2 Systems and methods for internal surface conditioning assessment in plasma processing equipment Electricity 0 Active
US10434623B2 Local area polishing system and polishing pad assemblies for a polishing system Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.