Target profile for a physical vapor deposition chamber target
USD1072774S1 · kind S1 · design
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Key dates
| Filing date | Feb 6, 2021 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Apr 29, 2040 |
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- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.