Patent · US Active

Target profile for a physical vapor deposition chamber target

USD1072774S1 · kind S1 · design

0Cited by
112References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 6, 2021
Grant dateApr 29, 2025
Priority date
Expiry dateApr 29, 2040

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.