Controller for semi-conductor processing machine
USD349888S · kind S · design
25Cited by
4References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 8, 1993 |
| Grant date | Aug 23, 1994 |
| Priority date | — |
| Expiry date | Aug 23, 2008 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.