Electrode for a semiconductor processing apparatus
USD363464S · kind S · design
477Cited by
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Key dates
| Filing date | Feb 26, 1993 |
| Grant date | Oct 24, 1995 |
| Priority date | — |
| Expiry date | Oct 24, 2009 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.