Kazuo Fukasawa
13Patents
10h-index
31Co-inventors
68Inventor score
Filing activity: Apr 28, 1989 → Jan 21, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD363464S | Electrode for a semiconductor processing apparatus | General | 477 | Expired |
| USD411516S | Gas diffusion plate for electrode of semiconductor wafer processing apparatus | General | 444 | Expired |
| US6110287A | Plasma processing method and plasma processing apparatus | Electricity | 238 | Expired |
| US5310453A | Plasma process method using an electrostatic chuck | Electricity | 108 | Expired |
| US5275683A | Mount for supporting substrates and plasma processing apparatus using the same | Emerging Cross-Sectional Technologies | 83 | Expired |
| US4908095A | Etching device, and etching method | Electricity | 66 | Expired |
| US6450190B2 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Emerging Cross-Sectional Technologies | 28 | Expired |
| US5872525A | Toll collection system | Physics | 24 | Expired |
| US5342471A | Plasma processing apparatus including condensation preventing means | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5483050A | Magnetic medium processing apparatus | Physics | 14 | Expired |
| US6606912B2 | Structure or construction for mounting a pressure detector | Physics | 9 | Expired |
| US6241152A | Card processing apparatus and method | Physics | 3 | Expired |
| US7049977B2 | Antenna unit and card processing system | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.