Inventor · Kofu, JP

Kazuo Fukasawa

13Patents
10h-index
31Co-inventors
68Inventor score

Filing activity: Apr 28, 1989 → Jan 21, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
USD363464S Electrode for a semiconductor processing apparatus General 477 Expired
USD411516S Gas diffusion plate for electrode of semiconductor wafer processing apparatus General 444 Expired
US6110287A Plasma processing method and plasma processing apparatus Electricity 238 Expired
US5310453A Plasma process method using an electrostatic chuck Electricity 108 Expired
US5275683A Mount for supporting substrates and plasma processing apparatus using the same Emerging Cross-Sectional Technologies 83 Expired
US4908095A Etching device, and etching method Electricity 66 Expired
US6450190B2 Method of detecting abnormalities in flow rate in pressure-type flow controller Emerging Cross-Sectional Technologies 28 Expired
US5872525A Toll collection system Physics 24 Expired
US5342471A Plasma processing apparatus including condensation preventing means Emerging Cross-Sectional Technologies 24 Expired
US5483050A Magnetic medium processing apparatus Physics 14 Expired
US6606912B2 Structure or construction for mounting a pressure detector Physics 9 Expired
US6241152A Card processing apparatus and method Physics 3 Expired
US7049977B2 Antenna unit and card processing system Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.