Wafer boat
USD378823S · kind S · design
26Cited by
4References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 1995 |
| Grant date | Apr 15, 1997 |
| Priority date | — |
| Expiry date | Apr 15, 2011 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.