Hirofumi Kitayama
14Patents
13h-index
30Co-inventors
74Inventor score
Filing activity: Aug 11, 1989 → Dec 10, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7235137B2 | Conductor treating single-wafer type treating device and method for semi-conductor treating | Chemistry; Metallurgy | 712 | Expired |
| US5217501A | Vertical wafer heat treatment apparatus having dual load lock chambers | Electricity | 79 | Expired |
| US5110248A | Vertical heat-treatment apparatus having a wafer transfer mechanism | Electricity | 71 | Expired |
| US5445486A | Substrate transferring apparatus | Emerging Cross-Sectional Technologies | 67 | Expired |
| US5162047A | Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers | Emerging Cross-Sectional Technologies | 58 | Expired |
| US4989540A | Apparatus for reaction treatment | Emerging Cross-Sectional Technologies | 42 | Expired |
| US5316472A | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Chemistry; Metallurgy | 35 | Expired |
| US6210482A | Apparatus for feeding gases for use in semiconductor manufacturing | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6095806A | Semiconductor wafer boat and vertical heat treating system | Emerging Cross-Sectional Technologies | 29 | Expired |
| USD378823S | Wafer boat | General | 26 | Expired |
| US5622639A | Heat treating apparatus | Chemistry; Metallurgy | 24 | Expired |
| US6360762B1 | Method for feeding gases for use in semiconductor manufacturing | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5030056A | Substrate transfer device | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5445521A | Heat treating method and device | Mechanical Engineering; Lighting; Heating | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.