Processing tube for use in a semiconductor wafer heat processing apparatus
USD405062S · kind S · design
31Cited by
10References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 5, 1998 |
| Grant date | Feb 2, 1999 |
| Priority date | — |
| Expiry date | Feb 2, 2013 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.