Inventor · Minato, JP

Tomohisa Shimazu

20Patents
14h-index
15Co-inventors
74Inventor score

Filing activity: Oct 27, 1995 → Jul 17, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5718574A Heat treatment apparatus Electricity 529 Expired
US5775889A Heat treatment process for preventing slips in semiconductor wafers Chemistry; Metallurgy 369 Expired
US6235121A Vertical thermal treatment apparatus Electricity 291 Expired
US6062853A Heat-treating boat for semiconductor wafers Electricity 56 Expired
USD411176S Wafer boat for use in a semiconductor wafer heat processing apparatus General 41 Expired
USD409158S Wafer boat for use in a semiconductor wafer heat processing apparatus General 34 Expired
USD407696S Inner tube for use in a semiconductor wafer heat processing apparatus General 34 Expired
USD404371S Wafer boat for use in a semiconductor wafer heat processing apparatus General 32 Expired
USD405062S Processing tube for use in a semiconductor wafer heat processing apparatus General 31 Expired
USD405431S Tube for use in a semiconductor wafer heat processing apparatus General 29 Expired
USD404368S Outer tube for use in a semiconductor wafer heat processing apparatus General 24 Expired
US6142773A Enveloping device and vertical heat-treating apparatus for semiconductor process system Emerging Cross-Sectional Technologies 18 Expired
US5709543A Vertical heat treatment apparatus Chemistry; Metallurgy 17 Expired
US6030457A Substrate processing apparatus Chemistry; Metallurgy 16 Expired
USD423026S Quartz cover General 12 Expired
US6031205A Thermal treatment apparatus with thermal protection members intercepting thermal radiation at or above a predetermined angle Electricity 10 Expired
USD404375S Heat retaining tube base for use in a semiconductor wafer head processing apparatus General 8 Expired
US6283175A Enveloping device and vertical heat-treating apparatus for semiconductor process system Emerging Cross-Sectional Technologies 7 Expired
US7479619B2 Thermal processing unit Electricity 2 Active
US7144823B2 Thermal treatment apparatus Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.