Tomohisa Shimazu
20Patents
14h-index
15Co-inventors
74Inventor score
Filing activity: Oct 27, 1995 → Jul 17, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5718574A | Heat treatment apparatus | Electricity | 529 | Expired |
| US5775889A | Heat treatment process for preventing slips in semiconductor wafers | Chemistry; Metallurgy | 369 | Expired |
| US6235121A | Vertical thermal treatment apparatus | Electricity | 291 | Expired |
| US6062853A | Heat-treating boat for semiconductor wafers | Electricity | 56 | Expired |
| USD411176S | Wafer boat for use in a semiconductor wafer heat processing apparatus | General | 41 | Expired |
| USD409158S | Wafer boat for use in a semiconductor wafer heat processing apparatus | General | 34 | Expired |
| USD407696S | Inner tube for use in a semiconductor wafer heat processing apparatus | General | 34 | Expired |
| USD404371S | Wafer boat for use in a semiconductor wafer heat processing apparatus | General | 32 | Expired |
| USD405062S | Processing tube for use in a semiconductor wafer heat processing apparatus | General | 31 | Expired |
| USD405431S | Tube for use in a semiconductor wafer heat processing apparatus | General | 29 | Expired |
| USD404368S | Outer tube for use in a semiconductor wafer heat processing apparatus | General | 24 | Expired |
| US6142773A | Enveloping device and vertical heat-treating apparatus for semiconductor process system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5709543A | Vertical heat treatment apparatus | Chemistry; Metallurgy | 17 | Expired |
| US6030457A | Substrate processing apparatus | Chemistry; Metallurgy | 16 | Expired |
| USD423026S | Quartz cover | General | 12 | Expired |
| US6031205A | Thermal treatment apparatus with thermal protection members intercepting thermal radiation at or above a predetermined angle | Electricity | 10 | Expired |
| USD404375S | Heat retaining tube base for use in a semiconductor wafer head processing apparatus | General | 8 | Expired |
| US6283175A | Enveloping device and vertical heat-treating apparatus for semiconductor process system | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7479619B2 | Thermal processing unit | Electricity | 2 | Active |
| US7144823B2 | Thermal treatment apparatus | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.