Vacuum processing equipment configuration
USD453402S1 · kind S1 · design
12Cited by
86References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Feb 5, 2016 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.