Atsushi Itou
88Patents
14h-index
58Co-inventors
87Inventor score
Filing activity: Jul 24, 1990 → Sep 18, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5320982A | Wafer cooling method and apparatus | Emerging Cross-Sectional Technologies | 101 | Expired |
| US5685684A | Vacuum processing system | Emerging Cross-Sectional Technologies | 90 | Expired |
| US5078851A | Low-temperature plasma processor | Electricity | 62 | Expired |
| US5314509A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 57 | Expired |
| USD745882S1 | Display screen with graphical user interface | General | 48 | Active |
| US5445484A | Vacuum processing system | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5784799A | Vacuum processing apparatus for substate wafers | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5673750A | Vacuum processing method and apparatus | Electricity | 25 | Expired |
| US5349762A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5105173A | Band-pass filter using microstrip lines | Electricity | 19 | Expired |
| US5553396A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5663884A | Multiprocessing apparatus | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6028147A | Block copolymer, process for producing the same and resin composition of the same | Chemistry; Metallurgy | 14 | Expired |
| US5448470A | Multiprocessing apparatus | Emerging Cross-Sectional Technologies | 14 | Expired |
| USD453402S1 | Vacuum processing equipment configuration | General | 12 | Expired |
| US5950330A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6451901B1 | Aqueous dispersion and process for producing the same | Chemistry; Metallurgy | 11 | Expired |
| US8279035B2 | Reactor | Electricity | 10 | Active |
| USD473354S1 | Vacuum processing equipment configuration | General | 10 | Expired |
| US5661913A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5457896A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7235516B2 | Semiconductor cleaning composition comprising an ethoxylated surfactant | Electricity | 7 | Expired |
| US6301802A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6968630B2 | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7214454B2 | Positively photosensitive insulating resin composition and cured object obtained therefrom | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.