Absorption board for an electric chuck used in semiconductor manufacture
USD553104S1 · kind S1 · design
576Cited by
8References
1Claims
0Family size
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Key dates
| Filing date | Oct 19, 2004 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Oct 16, 2021 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.