Takehiro Ueda
59Patents
7h-index
28Co-inventors
72Inventor score
Filing activity: Aug 2, 1999 → Nov 21, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD553104S1 | Absorption board for an electric chuck used in semiconductor manufacture | General | 576 | Expired |
| US8056503B2 | Plasma procesor and plasma processing method | Electricity | 38 | Expired |
| US7282751B2 | Semiconductor device | Electricity | 21 | Expired |
| US8387562B2 | Plasma processor and plasma processing method | Electricity | 15 | Active |
| US8904957B2 | Plasma processor and plasma processing method | Electricity | 10 | Active |
| US9437402B2 | Plasma processor and plasma processing method | Electricity | 9 | Active |
| US7646581B2 | Electrostatic chuck | Electricity | 8 | Active |
| US7635907B2 | Semiconductor device with electric fuse having a flowing-out region | Emerging Cross-Sectional Technologies | 7 | Active |
| US8476701B2 | Semiconductor device with gate electrode including a concave portion | Electricity | 7 | Active |
| US7411851B2 | Semiconductor device | Physics | 6 | Active |
| US7376036B2 | Semiconductor device including fuse and method for testing the same capable of suppressing erroneous determination | Physics | 6 | Expired |
| US7529147B2 | Semiconductor device and method of fabricating the same | Electricity | 6 | Active |
| US7619264B2 | Semiconductor device | Electricity | 4 | Active |
| US7835211B2 | Semiconductor device and method of fabricating the same | Electricity | 4 | Active |
| US7795699B2 | Semiconductor device | Electricity | 4 | Expired |
| US7728407B2 | Semiconductor device and method of cutting electrical fuse | Electricity | 4 | Active |
| US7679871B2 | Semiconductor device and method for determining fuse state | Electricity | 4 | Active |
| US8491752B2 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism | Emerging Cross-Sectional Technologies | 3 | Active |
| US8573836B2 | Apparatus and method for evaluating a substrate mounting device | Electricity | 3 | Active |
| US8362524B2 | Semiconductor device having a fuse element | Electricity | 3 | Active |
| US7489230B2 | Semiconductor device and method of manufacturing the same | Electricity | 3 | Active |
| US9000559B2 | Semiconductor device, method of cutting electrical fuse, and method of determining electrical fuse state | Electricity | 3 | Active |
| US7989913B2 | Semiconductor device and method for cutting electric fuse | Electricity | 3 | Active |
| US9728381B2 | Plasma processor and plasma processing method | Electricity | 2 | Active |
| US8236622B2 | Method for cutting electric fuse | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.