Cover ring for a plasma processing apparatus
USD557425S1 · kind S1 · design
30Cited by
8References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2005 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Dec 11, 2021 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.