Akitaka Makino
29Patents
7h-index
35Co-inventors
69Inventor score
Filing activity: Mar 26, 1993 → Feb 20, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD557226S1 | Electrode cover for a plasma processing apparatus | General | 597 | Expired |
| USD556704S1 | Grounded electrode for a plasma processing apparatus | General | 427 | Expired |
| US5458687A | Method of and apparatus for securing and cooling/heating a wafer | Electricity | 47 | Expired |
| USD557425S1 | Cover ring for a plasma processing apparatus | General | 30 | Expired |
| US5391260A | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7194821B2 | Vacuum processing apparatus and vacuum processing method | Physics | 8 | Expired |
| US7335277B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7828928B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 6 | Active |
| US7247207B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8897906B2 | Wafer processing based on sensor detection and system learning | Emerging Cross-Sectional Technologies | 5 | Active |
| US7416633B2 | Plasma processing apparatus | Emerging Cross-Sectional Technologies | 4 | Expired |
| US5607510A | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6850012B2 | Plasma processing apparatus | Electricity | 4 | Expired |
| US8569177B2 | Plasma processing apparatus and plasma processing method | Electricity | 2 | Active |
| US7674351B2 | Plasma processing apparatus | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8286822B2 | Vacuum processing apparatus | Electricity | 1 | Active |
| US8216420B2 | Plasma processing apparatus | Electricity | 1 | Active |
| US7641069B2 | Vacuum processing apparatus | Electricity | 1 | Active |
| US7322561B2 | Vacuum processing apparatus | Electricity | 1 | Expired |
| US7833382B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US8148268B2 | Plasma treatment apparatus and plasma treatment method | Electricity | 1 | Active |
| US11710619B2 | Vacuum processing apparatus | Electricity | 1 | Active |
| US8100620B2 | Vacuum processing apparatus | Electricity | 0 | Active |
| US8460467B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US10103007B2 | Plasma processing apparatus with gas feed and evacuation conduit | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.