Process tube for manufacturing semiconductor wafers
USD619630S1 · kind S1 · design
16Cited by
15References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2007 |
| Grant date | Jul 13, 2010 |
| Priority date | — |
| Expiry date | Jul 13, 2024 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.