Plasma reactor showerhead face plate having concentric ridge pattern
USD641829S1 · kind S1 · design
14Cited by
10References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2010 |
| Grant date | Jul 19, 2011 |
| Priority date | — |
| Expiry date | Jul 19, 2025 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.