James Eugene Caron
7Patents
3h-index
13Co-inventors
50Inventor score
Filing activity: Sep 12, 2008 → Mar 15, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8916022B1 | Plasma generator systems and methods of forming plasma | Electricity | 20 | Active |
| USD641829S1 | Plasma reactor showerhead face plate having concentric ridge pattern | General | 14 | Expired |
| US10699878B2 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | Electricity | 9 | Active |
| US10147588B2 | System and method for increasing electron density levels in a plasma of a substrate processing system | Electricity | 3 | Active |
| US10727089B2 | Systems and methods for selectively etching film | Electricity | 2 | Active |
| US10438833B2 | Wafer lift ring system for wafer transfer | Electricity | 1 | Active |
| US12362159B2 | Systems and methods for controlling a plasma sheath characteristic | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.