Boat of wafer processing apparatus
USD655682S1 · kind S1 · design
26Cited by
19References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2010 |
| Grant date | Mar 13, 2012 |
| Priority date | — |
| Expiry date | Mar 13, 2026 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.