Yuji Takebayashi
31Patents
7h-index
50Co-inventors
72Inventor score
Filing activity: Aug 21, 1996 → Apr 29, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9708708B2 | Method of manufacturing semiconductor device | Chemistry; Metallurgy | 448 | Active |
| USD655255S1 | Boat of wafer processing apparatus | General | 28 | Expired |
| USD655682S1 | Boat of wafer processing apparatus | General | 26 | Expired |
| USD610559S1 | Reaction tube | General | 25 | Expired |
| US5957651A | Substrate carrying apparatus | Emerging Cross-Sectional Technologies | 22 | Expired |
| US8828141B2 | Substrate processing apparatus and method for manufacturing semiconductor device | Chemistry; Metallurgy | 8 | Active |
| US8461062B2 | Substrate processing apparatus and method for manufacturing semiconductor device | Chemistry; Metallurgy | 7 | Active |
| US8343277B2 | Substrate processing apparatus | Chemistry; Metallurgy | 7 | Active |
| US8420552B2 | Method of manufacturing a semiconductor device | Electricity | 6 | Active |
| US8481434B2 | Method of manufacturing a semiconductor device and processing apparatus | Electricity | 5 | Active |
| USD828091S1 | Gas supply nozzle | General | 5 | Active |
| US8866271B2 | Semiconductor device manufacturing method, substrate processing apparatus and semiconductor device | Electricity | 4 | Active |
| US5798213A | Monoclonal antibodies | Physics | 2 | Expired |
| US9496134B2 | Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device | Electricity | 2 | Active |
| US9437421B2 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Chemistry; Metallurgy | 2 | Active |
| US10640869B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US11031270B2 | Substrate processing apparatus, substrate holder and mounting tool | Electricity | 1 | Active |
| US8741731B2 | Method of manufacturing a semiconductor device | Electricity | 1 | Active |
| US11020760B2 | Substrate processing apparatus and precursor gas nozzle | Electricity | 1 | Active |
| US11299804B2 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | Electricity | 0 | Active |
| US9646821B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US11869790B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Electricity | 0 | Active |
| US12371788B2 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 0 | Active |
| US12293932B2 | Substrate processing apparatus, elevator and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US7820686B2 | Therapeutic agent for inflammatory bowel disease | Human Necessities | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.