Patent · US Active

Wafer holding member

USD674761S1 · kind S1 · design

16Cited by

17References

1Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Naruaki Iida · Kumamoto, JP
Hideki Kajiwara · Sakai, JP

Key dates

Filing date	Mar 2, 2012
Grant date	Jan 22, 2013
Priority date	—
Expiry date	Jan 22, 2027

Classification

Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.