Inner tube for process tube for manufacturing semiconductor wafers
USD720309S1 · kind S1 · design
16Cited by
26References
1Claims
0Family size
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Key dates
| Filing date | May 10, 2012 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Dec 30, 2028 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.