Inner tube for process tube for manufacturing semiconductor wafers
USD724551S1 · kind S1 · design
9Cited by
27References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2012 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Mar 17, 2029 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.