Patent · US Active

Wafer holder for manufacturing semiconductor

USD766850S1 · kind S1 · design

7Cited by
27References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 12, 2014
Grant dateSep 20, 2016
Priority date
Expiry dateSep 20, 2030

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.