Inventor · Sagamihara, JP

Eisuke Morisaki

9Patents
5h-index
19Co-inventors
56Inventor score

Filing activity: Mar 16, 2000 → Sep 12, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6473993B1 Thermal treatment method and apparatus Electricity 22 Expired
US6630991B2 Thermal processing apparatus Physics 14 Expired
US6488407B1 Radiation temperature measuring method and radiation temperature measuring system Physics 9 Expired
USD766850S1 Wafer holder for manufacturing semiconductor General 7 Active
US6467952B2 Virtual blackbody radiation system and radiation temperature measuring system Physics 6 Expired
US8696814B2 Film deposition apparatus and film deposition method Electricity 3 Active
US8328943B2 Film forming apparatus and method Electricity 2 Active
US8440270B2 Film deposition apparatus and method Electricity 2 Active
US8409460B2 Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage medium Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.