Patent · US Active

Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool

USD814488S1 · kind S1 · design

26Cited by
67References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 10, 2014
Grant dateApr 3, 2018
Priority date
Expiry dateApr 3, 2032

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.