Patent · US Active

Base plate for a processing chamber substrate support

USD893441S1 · kind S1 · design

64Cited by
17References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 28, 2019
Grant dateAug 18, 2020
Priority date—
Expiry dateAug 18, 2035

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.