Liquid discharge nozzle for semiconductor substrate processing apparatus
USD929534S1 · kind S1 · design
1Cited by
8References
1Claims
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Key dates
| Filing date | Oct 23, 2019 |
| Grant date | Aug 31, 2021 |
| Priority date | — |
| Expiry date | Aug 31, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.