Substrate support pedestal
USD931240S1 · kind S1 · design
14Cited by
13References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2019 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Sep 21, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.