Component of a liquid discharge nozzle for semiconductor substrate processing apparatus
USD934991S1 · kind S1 · design
4Cited by
11References
1Claims
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Key dates
| Filing date | Oct 23, 2019 |
| Grant date | Nov 2, 2021 |
| Priority date | — |
| Expiry date | Nov 2, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.