Patent · US Active

Process shield for a substrate processing chamber

USD941372S1 · kind S1 · design

17Cited by
34References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 20, 2020
Grant dateJan 18, 2022
Priority date—
Expiry dateJan 18, 2037

Classification

  • Technology area (CPC —)General

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.