Base plate for a processing chamber substrate support

USD947914S1 · kind S1 · design

Assignee

• Applied Materials, Inc. · US

Inventors

• Shreesha Yogish Rao · Milpitas, US
• Mukund Sundararajan · Kanchinakote, IN
• Cheng-Hsiung Tsai · Cupertino, US
• Manjunatha Koppa · Kanchinakote, IN
• Steven V. Sansoni · Livermore, US

Key dates

• Filing date: Nov 23, 2020
• Grant date: Apr 5, 2022
• Expiry date: Apr 5, 2037

Classification

• Technology area (CPC —): General