Cooling plate for a semiconductor processing apparatus
USD956705S1 · kind S1 · design
3Cited by
20References
1Claims
0Family size
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Key dates
| Filing date | May 5, 2020 |
| Grant date | Jul 5, 2022 |
| Priority date | — |
| Expiry date | Jul 5, 2037 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.