Radial flow reactor including glow discharge limitting shield

USRE30244E · kind E · reissue

Assignee

• Bell Telephone Laboratories, Inc. · US

Inventors

• Frank B. Alexander, Jr. · Paterson, US
• Cesar D. Capio · Fords, US
• Victor E. Hauser, Jr. · Palmerton, US
• Hyman J. Levinstein · Berkeley Heights, US
• Cyril J. Mogab · New Providence, US
• Ashok Sinha · Palo Alto, US
• Richard S. Wagner, II · Loveland, US

Key dates

• Filing date: Sep 28, 1978
• Grant date: Apr 1, 1980
• Expiry date: Sep 28, 1998

Classification

• Technology area (CPC —): General

Abstract

An improved radio frequency (rf) powered radial flow cylindrical reactor utilizes a gas shield which substantially limits the glow plasma discharge reaction to a section of the reactor over the semiconductor substrates which are to be coated. The gas shield permits the use of higher rf input power which contributes to the formation of protective films that have desirable physical and electrical characteristics.